Trillium SubFab Services Inc
Semiconductor Vacuum Pumps & Peripherals Service & Repair Trillium SubFab Services, Inc.'s mission is to provide our customers with a high quality, flexible, and cost effective solution for vacuum pump service, as well as other SubFab equipment service and support. Trillium SubFab Services, Inc. was established in 2002 at our facility in Wilsonville, OR. Recently, we have expanded our facility to include an additional 1,000 square feet of warehouse space, bringing our total facility size to over 12,000 square feet.